Development of metallization systems for VLSI technology

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Development of metallization systems for VLSI technology


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Book's title: Development of metallization systems for VLSI technology
International Standard Book Number (ISBN):9155414699 91-554-1469-9
System Control Number:(OCoLC)260134221
System Control Number:(DE-599)BVBBV000147725
Cataloging Source:DE-604 ger rakddb
Personal Name:Östling, Mikael Verfasser (DE-588)151870314
Publication, Distribution, etc.:Uppsala (c)1983
Physical Description:19 S.
Series Statement:Uppsala Universitet: Acta Universitatis Upsaliensis / Abstracts of Uppsala diss. from the Fac. of Science $v702
Dissertation Note:Vollst. zugl.: Uppsala, Univ., Diss., 1983
Corporate Name:Uppsala Universitet$pActa Universitatis Upsaliensis$tAbstracts of Uppsala diss. from the Fac. of Science $v702$w(DE-604)BV000000680
Rubrics: Mikroelektronik
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